Nilfisk SS Vapor Specialty Semiconductor Vacuum

Designed for the unique cleaning requirements of the semiconductor industry, the Vapor Vac captures toxic gases such as arsine, phosphine, and chlorinated solvents released during the cleaning of process equipment such as molecular beam epitaxy chambers, ion implanters, and plasma etching machines.

Only Nilfisk industrial vacuums help boost productivity and save valuable man-hours. These machines are specifically designed to deliver a fast, thorough cleaning, which enables you to get the job done right the first time you do it. These machines can quickly collect huge quantities of dirt, debris, hazardous materials, or whatever else your facility can produce, with very little maintenance required. They are built ruggedly to survive even the toughest conditions, and with these vacuums on your side, you will notice a marked improvement in efficiency. Specifically, Nilfisk vacuums feature explosion and static protection, which will reduce your risk when collecting explosion-hazard materials; efficient bulk collection; simple waste disposal; improved air quality due to advanced filtration systems; anti-clogging filtration to maximize suction power and eliminate clogging; user-friendly features to maximize user comfort and reduce fatigue; easy-to-clean design for quick cleanup in even the toughest of plant environments.

Standard Equipment

• Disposable paper bags (5/pkg)
• Specially impregnated carbon filter
• Positive twist safety latches offer added security
• Heavy-duty trolley assembly
• Container plug with lanyard
• Wand end cap and microfilter
• Stainless steel container and trolley ensure easy decontamination
• Pre-HEPA prevents harmful particulate from damaging carbon filter
• Built-in activated carbon filtration with honeycomb design allows maximum dwell-time of toxic gases, preventing their escape via the vacuum's exhaust